Power semiconductor device

ABSTRACT

A power semiconductor device includes trenches disposed in a first base layer of a first conductivity type at intervals to partition main and dummy cells, at a position remote from a collector layer of a second conductivity type. In the main cell, a second base layer of the second conductivity type, and an emitter layer of the first conductivity type are disposed. In the dummy cell, a buffer layer of the second conductivity type is disposed. A gate electrode is disposed, through a gate insulating film, in a trench adjacent to the main cell. A buffer resistor having an infinitely large resistance value is inserted between the buffer layer and emitter electrode. The dummy cell is provided with an inhibiting structure to reduce carriers of the second conductivity type to flow to and accumulate in the buffer layer from the collector layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a divisional application of Ser. No.11/221,702 filed Sep. 9, 2005 (now allowed), which is a divisional ofU.S. Pat. No. 7,078,740 issued Jul. 18, 2006, which is a divisional ofU.S. Pat. No. 6,809,349, issued Oct. 26, 2004 and claims priority toJapanese Patent Application No. 2002-318059, filed Oct. 31, 2002, theentire contents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of Invention

The present invention relates to a power semiconductor device, andparticularly to an insulated gate semiconductor device favorably used asa power switching element.

2. Description of the Related Art

In recent years, power supply devices used in the power electronicsfield are strongly required to be more compact with higher performance.In accordance with this demand, power semiconductor devices have beenimproved to operate with lower loss and fewer noises, as well as higherbreakdown voltage and larger electric current. Under the circumstances,an IEGT (Injection Enhanced Gate Transistor) obtained by improving anIGBT (Insulated Gate Bipolar Transistor) is attracting attention as adevice, which can reduce the turn-off loss, as well as reducing theon-state voltage (for example, Jpn. Pat. Appln. KOKAI Publication No.5-24356; Jpn. J. Appl. Phys. Vol. 36 (1997) pp. 3433-3437, ISSCC 2000Digest Paper TA7.2; and M. Kitagawa et al., “A 4500V Injection EnhancedInsulated Gate Bipolar Transistor (IEGT) in a Mode Similar to aThyristor”, IEDM '93, pp. 679-682, 1993).

FIG. 25 is a sectional view showing a conventional IEGT having a trenchstructure. As shown in FIG. 25, on one side of an n-base layer 101, ann-buffer layer 102 is disposed, and a p-collector layer 103 is furtherdisposed thereon. On the other side of the n-base layer 101, a pluralityof trenches 104 are formed at intervals in the n-base layer 101, suchthat main cells MR and dummy cells DR are alternately partitioned.

In each of the main cells MR, a p-base layer 107 is disposed on then-base layer 101. N-emitter layers 108 are formed in the surface of thep-base layer 107. In each of the dummy cells DR, a p-buffer layer 109 isdisposed on the n-base layer 101. Dividing a common p-layer by thetrenches 104 forms the p-base layers 107 and p-buffer layers 109.

A collector electrode 111 is disposed on the p-collector layer 103. Anemitter electrode 112 is disposed on the p-base layer 107 and n-emitterlayers 108. A gate electrode 106 is buried in each of the trenches 104,while it is wrapped in a gate insulating film 105. As a consequence, ann-channel MOSFET is formed in the main cell MR, such that it selectivelyconnects the n-emitter layer 108 to the n-base layer 101, using thep-base layer 107 as a channel region, to inject electrons.

In the sectional view shown in FIG. 25, the surface of the p-bufferlayer 109 in each of the dummy cells DR is covered with an insulatingfilm 110. However, in order to fix the potential of the p-buffer layer109, a part of the emitter electrode 112 is also disposed on thep-buffer layer 109 at a position not shown in FIG. 25. The density ofthe part of the emitter electrode 112 disposed on the p-buffer layer 109is small, so that the resistance between the p-buffer layer 109 andemitter electrode 112 is equivalently large.

In this IEGT, each of the main cells MR forms a narrow current passageconnecting the n-base layer 101 to the emitter electrode 112. In theon-state of the IEGT, this arrangement provides an increase inresistance against the flow of holes from the n-base layer 101 into theemitter electrode 112 through the p-base layer 107 in the main cell MR,thereby restricting the holes being exhausted into the emitter electrode112. As a consequence, the injection efficiency of electrons from then-emitter layers 108 into the n-base layer 101 improves, therebypromoting conductivity modulation of the n-base layer 101, resulting ina low on-state voltage.

A CSTBT (Carrier Stored Trench-Gate Bipolar Transistor) has also beenproposed as a power semiconductor device, which can reduce theon-resistance as in the IEGT (for example, H. Takahashi et al., “CarrierStored Trench-Gate Bipolar Transistor (CSTBT)—A Novel Power Device forHigh Voltage Application” ISPSD '96, pp. 349-352, 1996). FIG. 26 is asectional view showing a conventional CSTBT.

As shown in FIG. 26, on one side of an n-base layer 131, a p-collectorlayer 133 is disposed. On the other side of the n-base layer 131, ann-barrier layer 132 having an impurity concentration higher than that ofthe n-base layer 131 is disposed. A p-base layer 137 is disposed on then-barrier layer 132. N-emitter layers 138 are formed in the surface ofthe p-base layer 137. A plurality of trenches 134 are formed atintervals such that they extend from the substrate surface into then-base layer 131.

A collector electrode 141 is disposed on the p-collector layer 133. Anemitter electrode 142 is disposed on the p-base layer 137 and n-emitterlayers 138. A gate electrode 136 is buried in each of the trenches 134,while it is wrapped in a gate insulating film 135. As a consequence, ann-channel MOSFET is formed such that it selectively connects then-emitter layer 138 to the n-base layer 131, using the p-base layer 137as a channel region, to inject electrons.

In this CSTBT, the n-barrier layer 132 having a high impurityconcentration provides a large resistance against flow of holes. In theon-state of the CSTBT, this arrangement provides an increase inresistance against the flow of holes from the n-base layer 131 into theemitter electrode 142 through the p-base layer 137, thereby restrictingthe holes being exhausted into the emitter electrode 142. As aconsequence, the injection efficiency of electrons from the n-emitterlayers 138 into the n-base layer 131 improves, thereby promotingconductivity modulation of the n-base layer 131, resulting in a lowon-state voltage.

The conventional IEGT and CSTB, used as power semiconductor devices,have the advantage of providing a low on-state voltage. However, theseconventional power semiconductor devices have a problem causing a largenoise in switching, and especially being turned on, as described above.In addition, since the resistance against holes being exhausted is high,a problem arises in that a period of time (storage period) for adepletion layer to extend up from the start of voltage rising isprolonged when the devices are turned off. This increases the turn-offloss, as well as the turn-off time.

BRIEF SUMMARY OF THE INVENTION

According to a first aspect of the present invention, there is provideda power semiconductor device comprising:

a first base layer of a first conductivity type;

a collector layer of a second conductivity type disposed on the firstbase layer;

a plurality of trenches disposed in the first base layer at intervals topartition a main cell and a dummy cell, at a position remote from thecollector layer;

a second base layer of the second conductivity type disposed on thefirst base layer in the main cell;

an emitter layer of the first conductivity type disposed on the secondbase layer;

a buffer layer of the second conductivity type disposed on the firstbase layer in the dummy cell;

a gate electrode disposed in a trench of the plurality of trenches,adjacent to the main cell, to face, through a gate insulating film, aportion of the second base layer sandwiched between the first base layerand the emitter layer;

a collector electrode disposed on the collector layer;

an emitter electrode disposed on the second base layer and the emitterlayer; and

a buffer resistor inserted between the buffer layer and the emitterelectrode,

wherein the main cell forms a current passage narrow enough to provide,in an on-state of the device, an increase in resistance against flow ofcarriers of the second conductivity type from the first base layer intothe emitter electrode through the second base layer, thereby improvinginjection efficiency of carriers of the first conductivity type from theemitter layer into the first base layer, and

the buffer resistor has a resistance value smaller than that with whichgate-emitter voltage is increased by gate negative capacity, in a periodof time for an applied voltage between gate and emitter to chargecapacity between gate and collector, in process of turn-on of thedevice.

According to a second aspect of the present invention, there is provideda power semiconductor device comprising:

a first base layer of a first conductivity type;

a collector layer of a second conductivity type disposed on the firstbase layer;

a plurality of trenches disposed in the first base layer at intervals topartition a main cell and a dummy cell, at a position remote from thecollector layer;

a second base layer of the second conductivity type disposed on thefirst base layer in the main cell;

an emitter layer of the first conductivity type disposed on the secondbase layer;

a buffer layer of the second conductivity type disposed on the firstbase layer in the dummy cell;

a gate electrode disposed in a trench of the plurality of trenches,adjacent to the main cell, to face, through a gate insulating film, aportion of the second base layer sandwiched between the first base layerand the emitter layer;

a collector electrode disposed on the collector layer;

an emitter electrode disposed on the second base layer and the emitterlayer; and

a buffer resistor inserted between the buffer layer and the emitterelectrode and having an infinitely large resistance value,

wherein the main cell forms a current passage narrow enough to provide,in an on-state of the device, an increase in resistance against flow ofcarriers of the second conductivity type from the first base layer intothe emitter electrode through the second base layer, thereby improvinginjection efficiency of carriers of the first conductivity type from theemitter layer into the first base layer, and the dummy cell is providedwith an inhibiting structure configured to reduce a quantity of carriersof the second conductivity type to flow to and accumulate in the bufferlayer from the collector layer, in a period of time for an appliedvoltage between gate and emitter to charge capacity between gate andemitter, in process of turn-on of the device, as compared to a casewhere the buffer layer and the second base layer are formed with thesame impurity concentration and depth.

According to a third aspect of the present invention, there is provideda power semiconductor device comprising:

a first base layer of a first conductivity type;

a collector layer of a second conductivity type disposed on the firstbase layer;

a plurality of trenches disposed in the first base layer at intervals topartition a main cell and a dummy cell, at a position remote from thecollector layer;

a second base layer of the second conductivity type disposed on thefirst base layer in the main cell;

an emitter layer of the first conductivity type disposed on the secondbase layer;

a buffer layer of the second conductivity type disposed on the firstbase layer in the dummy cell;

a gate electrode disposed in a trench of the plurality of trenches,adjacent to the main cell, to face, through a gate insulating film, aportion of the second base layer sandwiched between the first base layerand the emitter layer;

a collector electrode disposed on the collector layer;

an emitter electrode disposed on the second base layer and the emitterlayer; and

a buffer resistor inserted between the buffer layer and the emitterelectrode and having an infinitely large resistance value,

wherein the main cell forms a current passage narrow enough to provide,in an on-state of the device, an increase in resistance against flow ofcarriers of the second conductivity type from the first base layer intothe emitter electrode through the second base layer, thereby improvinginjection efficiency of carriers of the first conductivity type from theemitter layer into the first base layer, and

a switching element configured to selectively connect the buffer layerto the second base layer is formed at a position beyond an end of thegate electrode in a channel width direction, and carriers of the secondconductivity type are exhausted from the buffer layer to the second baselayer through the switching element, in a period of time for an appliedvoltage between gate and emitter to charge capacity between gate andemitter, in process of turn-on of the device.

According to a fourth aspect of the present invention, there is provideda power semiconductor device comprising:

a first base layer of a first conductivity type;

a collector layer of a second conductivity type disposed on the firstbase layer;

a trench disposed in the first base layer at a position remote from thecollector layer;

a second base layer of the second conductivity type disposed on thefirst base layer and in contact with the trench;

an emitter layer of the first conductivity type disposed on the secondbase layer;

a gate electrode disposed in the trench to face, through a gateinsulating film, a portion of the second base layer sandwiched betweenthe first base layer and the emitter layer;

a collector electrode disposed on the collector layer;

an emitter electrode disposed on the second base layer and the emitterlayer;

a barrier layer of the first conductivity type disposed between thefirst base layer and the second base layer, and having an impurityconcentration higher than that of the first base layer, the barrierlayer providing, in an on-state of the device, an increase in resistanceagainst flow of carriers of the second conductivity type from the firstbase layer into the emitter electrode through the second base layer,thereby improving injection efficiency of carriers of the firstconductivity type from the emitter layer into the first base layer;

a diverter layer of the second conductivity type disposed on the firstbase layer, to exhaust carriers of the second conductivity type from thefirst base layer; and

a rectifying element including a portion of the first conductivity typeelectrically connected to the emitter electrode, and a portion of thesecond conductivity type electrically connected to the diverter layer,the rectifying element becoming conductive by a change in potential ofthe diverter layer, thereby exhausting carriers of the secondconductivity type from the diverter layer into the emitter electrode, inprocess of turn-off of the device.

According to a fifth aspect of the present invention, there is provideda power semiconductor device comprising:

a first base layer of a first conductivity type;

a collector layer of a second conductivity type disposed on the firstbase layer;

a trench disposed in the first base layer at a position remote from thecollector layer;

a second base layer of the second conductivity type disposed on thefirst base layer and in contact with the trench;

an emitter layer of the first conductivity type disposed on the secondbase layer;

a gate electrode disposed in the trench to face, through a gateinsulating film, a portion of the second base layer sandwiched betweenthe first base layer and the emitter layer;

a collector electrode disposed on the collector layer;

an emitter electrode disposed on the second base layer and the emitterlayer;

a barrier layer of the first conductivity type disposed between thefirst base layer and the second base layer, and having an impurityconcentration higher than that of the first base layer, the barrierlayer providing, in an on-state of the device, an increase in resistanceagainst flow of carriers of the second conductivity type from the firstbase layer into the emitter electrode through the second base layer,thereby improving injection efficiency of carriers of the firstconductivity type from the emitter layer into the first base layer;

a diverter layer of the second conductivity type disposed on the firstbase layer, to exhaust carriers of the second conductivity type from thefirst base layer; and

an MOSFET with a second conductivity type channel configured to bedriven by a driving electrode electrically connected to the gateelectrode to selectively connect the diverter layer to the emitterelectrode, the MOSFET with a second conductivity type channel becomingconductive by a change in potential of the driving electrode, therebyexhausting carriers of the second conductivity type from the diverterlayer into the emitter electrode, in process of turn-off of the device.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

FIG. 1 is a sectional view showing a power semiconductor device (IEGT)according to a first embodiment of the present invention;

FIGS. 2A and 2B are graphs obtained by experiments and showing voltageand current waveforms in the turn-on of an IEGT according to acomparative example 1, and an IEGT according to a present example 1 ofthe first embodiment, respectively;

FIGS. 3A and 3B are graphs obtained by simulations and showing gatecharge characteristics in the turn-on of the IEGT according to thecomparative example 1, and the IEGT according to the present example 1,respectively;

FIGS. 4A and 4B are graphs obtained by simulations and showing therelationship of the dV/dt and on-state voltage relative to theresistance value Rbuff of a buffer resistor, and the relationship of theVge range NCR, in which the Vge-Qg characteristic shows negativecapacity, and on-state voltage relative to the Rbuff, respectively;

FIG. 5 is a view showing the plan layout of a power semiconductor device(IEGT) according to a second embodiment of the present invention;

FIG. 6 is a sectional view taken along line VI-VI in each of FIGS. 5, 7,8, 10, 12, 20, and 22;

FIG. 7 is a view showing the plan layout of a power semiconductor device(IEGT) according to a third embodiment of the present invention;

FIG. 8 is a view showing the plan layout of a power semiconductor device(IEGT) according to a fourth embodiment of the present invention;

FIG. 9 is a sectional view taken along line IX-IX in FIG. 8;

FIG. 10 is a view showing the plan layout of a power semiconductordevice (IEGT) according to a fifth embodiment of the present invention;

FIG. 11 is a sectional view taken along line XI-XI in FIG. 10;

FIG. 12 is a view showing the plan layout of a power semiconductordevice (IEGT) according to a sixth embodiment of the present invention;

FIG. 13 is a sectional view taken along line XIII-XIII in FIG. 12;

FIG. 14 is a sectional view showing a power semiconductor device (IEGT)according to a seventh embodiment of the present invention;

FIGS. 15A and 15B are graphs obtained by experiments and showing voltageand current waveforms in the turn-on of an IEGT according to acomparative example 2, and an IEGT according to a present example 2 ofthe seventh embodiment, respectively;

FIG. 16 is a graph obtained by simulations and showing gate chargecharacteristics in the turn-on of the IEGT according to the comparativeexample 2, and the IEGT according to the present example 2;

FIG. 17 is a sectional view showing a power semiconductor device (IEGT)according to an eighth embodiment of the present invention;

FIG. 18 is a sectional view showing a power semiconductor device (IEGT)according to a ninth embodiment of the present invention;

FIG. 19 is a sectional view showing a power semiconductor device (IEGT)according to a tenth embodiment of the present invention;

FIG. 20 is a view showing the plan layout of a power semiconductordevice (IEGT) according to an eleventh embodiment of the presentinvention;

FIG. 21 is a sectional view taken along line XXI-XXI in FIG. 20;

FIG. 22 is a view showing the plan layout of a power semiconductordevice (IEGT) according to a twelfth embodiment of the presentinvention;

FIG. 23 is a sectional view taken along line XXIII-XXIII in FIG. 22;

FIG. 24 is a sectional view showing a power semiconductor device (IEGT)according to a thirteenth embodiment of the present invention;

FIG. 25 is a sectional view showing a conventional IEGT having a trenchstructure;

FIG. 26 is a sectional view showing a conventional CSTBT;

FIG. 27 is a sectional view showing a power semiconductor deviceaccording to a fourteenth embodiment of the present invention;

FIGS. 28A and 28B are views showing operations of the powersemiconductor device shown in FIG. 27;

FIG. 29 is a sectional view showing a power semiconductor deviceaccording to a fifteenth embodiment of the present invention;

FIG. 30 is a sectional view showing a power semiconductor deviceaccording to a sixteenth embodiment of the present invention;

FIG. 31 is a sectional view showing a power semiconductor deviceaccording to a seventeenth embodiment of the present invention;

FIG. 32 is a sectional view showing a power semiconductor deviceaccording to an eighteenth embodiment of the present invention;

FIG. 33 is a sectional view showing a power semiconductor deviceaccording to a nineteenth embodiment of the present invention;

FIG. 34 is a sectional view showing a power semiconductor deviceaccording to a twentieth embodiment of the present invention;

FIGS. 35A to 35C are sectional views showing steps of a method ofmanufacturing a power semiconductor device according to a twenty-firstembodiment of the present invention;

FIGS. 36A to 36D are sectional views showing steps of a method ofmanufacturing a power semiconductor device according to a twenty-secondembodiment of the present invention;

FIG. 37 is a sectional view showing a power semiconductor deviceaccording to a twenty-third embodiment of the present invention;

FIG. 38 is a sectional perspective view showing a power semiconductordevice according to a twenty-fourth embodiment of the present invention;

FIG. 39 is a sectional view taken along line XXXIX-XXXIX in FIG. 38;

FIGS. 40A to 40D are sectional views showing steps of a method ofmanufacturing the power semiconductor device according to thetwenty-fourth embodiment of the present invention;

FIGS. 41A and 41B are sectional perspective views showing powersemiconductor devices according to a twenty-fifth embodiment of thepresent invention, and a modification thereof, respectively; and

FIG. 42 is a sectional view showing a power semiconductor deviceaccording to a twenty-sixth embodiment of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

In the process of developing the present invention, the inventorsconducted research on the conventional IEGT shown in FIG. 25 and soforth. As a result, the inventors have arrived at the findings givenbelow.

In the IEGT shown in FIG. 25, the density of the part of the emitterelectrode 112 disposed on the p-buffer layers 109 is set small enough toprevent holes from leaking into the emitter electrode 112. In otherwords, the resistance between the p-buffer layers 109 and emitterelectrode 112 is very large. As a consequence, the IEGT has theadvantage of obtaining a low on-state voltage, while it has thefollowing problem.

Specifically, in switching of the IEGT, and especially in the turn-on,the voltage change rate (dV/dt) between the collector and emitter islarge, thereby generating an excessive switching noise. In general, thedV/dt of an insulated gate semiconductor device, such as a MOSFET orIGBT, can be reduced to suppress the switching noise by adjustingcharge/discharge time of the gate capacitance by means of a gateresistor. In the IEGT shown in FIG. 25, however, the dV/dt cannot becontrolled by a gate resistor, but maintains a high value.

These problems seem to be caused on the basis of the relationshipbetween the applied voltage between the gate and emitter (in otherwords, the voltage applied to the gate electrode) and holes accumulatingin that surface region of each dummy cell, which is not deeper than thetrench, and especially in the p-buffer layer 109, in the process ofturn-on of the IEGT. Specifically, in the process of turn-on of theIEGT, with an increase in the applied voltage between the gate andemitter, the IEGT passes through the following two periods of time untilit comes into an on-state. In the first period of time, the appliedvoltage between the gate and emitter is used to charge the capacitybetween the gate and emitter. In the second period of time (Millerperiod), the applied voltage between the gate and emitter charges thecapacity between the gate and collector.

In the first period of time, the gate-emitter voltage (the electricpotential difference between the gate and emitter) increases from aninitial negative voltage toward a predetermined positive voltage. Inthis period of time, mainly, an inversion layer is formed in thatsurface portion of the p-base layer 107 and p-buffer layer 109, whichfaces each gate electrode 106, and electrons accumulate and start beinginjected. In the next Miller period, ideally, the gate-emitter voltagemaintains the positive predetermined voltage (however, it deviates fromthe ideal state, thereby generating noises). In this period of time,mainly, positive spatial charge is removed in that portion of the n-baselayer 101, which faces each gate electrode 106.

The conventional IEGT has a very large resistance between the p-bufferlayers 109 and emitter electrode 112. This increases the quality ofholes to accumulate in the surface portion of each dummy cell adjacentto the corresponding trench 104 (a portion of the p-buffer layer 109 andn-base layer 101 sandwiched between two trenches 14), in the firstperiod of time in the process of turn-on of the IEGT, and especially ina period of time just after electrons start being injected. The holesaccumulating in the p-buffer layers 109 causes an excessive switchingnoise when the IEGT is turned on. The principle of such a phenomenonwill be explained in more detail, in relation to embodiments describedlater.

On the other hand, in relation to the turn-off characteristic of powersemiconductor devices, a diverter structure has been proposed as astructure for reducing the turn-off loss of an IGBT (for example, R.Constapel, J. Korec and B. J. Baliga, “Trench-IGBTs with IntegratedDiverter Structures”, ISPSD '95, pp. 201-206, 1995). This structureincludes a p-diverter layer formed in the n-base layer of an IGBT, sothat holes in the n-base layer are exhausted therethrough when the IGBTis turned off. This structure has problems in that accumulating carriersare reduced in the on-state thereby increasing the on-resistance, andits manufacture is structurally difficult.

Embodiments of the present invention achieved on the basis of thefindings given above will now be described with reference to theaccompanying drawings. In the following description, the constituentelements having substantially the same function and arrangement aredenoted by the same reference numerals, and a repetitive descriptionwill be made only when necessary. In the following embodiments, thefirst conductivity type is n-type, and the second conductivity type isp-type.

First Embodiment

FIG. 1 is a sectional view showing a power semiconductor device (IEGT)according to a first embodiment of the present invention. As shown inFIG. 1, on one side of an n-base layer 1 having a high resistivity, ann-buffer layer 2 having a high impurity concentration is disposed, and ap-collector layer 3 having a high impurity concentration is furtherdisposed thereon. The n-buffer layer 2 may be omitted such that thep-collector layer 3 is in direct contact with the n-base layer 1. On theother side of the n-base layer 1, a plurality of trenches 4 are formedat intervals in the n-base layer 1, such that main cells MR and dummycells DR are partitioned.

In each of the main cells MR, a p-base layer 7 is disposed on the n-baselayer 1. N-emitter layers 8 are formed in the surface of the p-baselayer 7. In each of the dummy cells DR, a p-buffer layer 9 is disposedon the n-base layer 1. The p-base layers 7 and p-buffer layers 9 may beformed independently of each other, or may be formed by dividing acommon p-layer by the trenches 4.

A collector electrode 11 is disposed on and in contact with thep-collector layer 3. An emitter electrode 12 is disposed on and incontact with the p-base layer 7 and n-emitter layers 8. A p-contactlayer having a high impurity concentration may be formed in the p-baselayer 7 and in contact with the emitter electrode 12.

Of the trenches 4, the trench 4 adjacent to each of the main cells MR isprovided with a gate electrode 6 buried therein, while it is wrapped ina gate insulating film 5. Where the main cells MR and dummy cells DR arealternately disposed, the gate electrode 6 is buried in each of all thetrenches 4. The gate electrode 6 faces that portion of the p-base layer7, which is sandwiched between the n-base layer 1 and n-emitter layer 8,through the gate insulating film 5.

As a consequence, an n-channel MOSFET is formed in the main cell MR,such that it selectively connects the n-emitter layer 8 to the n-baselayer 1, using the p-base layer 7 as a channel region, to injectelectrons. On the other hand, the dummy cells DR are not provided withsuch an n-channel MOSFET.

The IEGT shown in FIG. 1 can attain a low on-state voltage almost thesame as that of a thyrister, where the depth, width, interval of thetrenches 4 are suitably designed. This is given by the dummy cells DRthat bring about resistance against hole current injected from thep-collector layer 3, as follows. Specifically, the dummy cells DRprovide a lateral resistance of the n-base layer 1, and each of the maincells MR forms a current passage connecting the n-base layer 1 to theemitter electrode 12, which is narrow enough to generate a resistance.

In the on-state of the IEGT, this arrangement provides an increase inresistance against the flow of holes from the p-collector layer 3 intothe emitter electrode 12 through the n-base layer 1 and p-base layer 7in the main cell MR, thereby restricting the holes being exhausted intothe emitter electrode 12. As a consequence, the injection efficiency ofelectrons from the n-emitter layers 8 into the base layer 1 improves,thereby promoting conductivity modulation of the n-base layer 1,resulting in a low on-state voltage

A buffer electrode 13 is disposed on the p-buffer layer 9 in each of thedummy cells DR. The buffer electrode 13 is electrically connected to theemitter electrode 12 through a buffer resistor 14. In this embodiment,the buffer resistor 14 employs the resistance of an interconnection lineincluding a resistor, which is placed outside the p-buffer layer 9 andelectrically connects the buffer electrode 13 to the emitter electrode12.

FIGS. 2A and 2B are graphs obtained by experiments and showing voltageand current waveforms in the turn-on of an IEGT according to acomparative example 1, and an IEGT according to a present example 1 ofthe first embodiment, respectively. In FIGS. 2A and 2B, Vge stands forthe gate-emitter voltage, Vce for the collector-emitter voltage, and Icfor the collector current.

In the experiments, both the IEGTs according to the comparative example1 and present example 1 were provided with a breakdown voltage of1,200V, an applied voltage of 600V between the collector and emitter,and a gate resistance Rg of 51Ω. The IEGT according to the comparativeexample 1 was provided with a resistance of 10Ω between the p-bufferlayer 109 and emitter electrode 112, while the IEGT according to thepresent example 1 was provide with a resistance of 1Ω between thep-buffer layer 9 and emitter electrode 12.

As shown in FIG. 2A, in the IEGT according to the comparative example 1,the voltage change rate (dV/dt) between the collector and emitter wasabout 20 kV/μs or more, thereby fiercely shaking the waveforms, at theearly stage of the Miller period t1 to t2 (a period of time for theapplied voltage between the gate and emitter to charge the capacitybetween the gate and collector). On the other hand, as shown in FIG. 2B,in the IEGT according to the present example 1, the dV/dt was reduced toabout 5 kV/μs or less, thereby suppressing shaking of the waveforms, atthe early stage of the Miller period t1 to t2.

Furthermore, both the IEGTs according to the comparative example 1 andpresent example 1 were subjected to experiments in changing the gateresistance Rg. As a consequence, the IEGT according to the comparativeexample 1 barely showed a change in the dV/dt with the change in thegate resistance Rg. On the other hand, the IEGT according to the presentexample 1 allowed the dV/dt to be adjusted to, e.g., 2 to 10 kV/μs withthe change in the gate resistance Rg.

FIGS. 3A and 3B are graphs obtained by simulations and showing gatecharge characteristics in the turn-on of the IEGT according to thecomparative example 1, and the IEGT according to the present example 1,respectively. In FIGS. 3A and 3B, Vge stands for the gate-emittervoltage, Vce for the collector-emitter voltage, and Qg for the gatecharge. Furthermore, solid lines show characteristics obtained bydynamic calculation, while broken lines show characteristics obtained bystatic calculation (Vce=0V and Vce=600V). The conditions on the IEGTs inthe simulations were the same as those explained with reference to FIGS.2A and 2B, except for parameters of the simulations.

In the IEGT according to the comparative example 1, the gate-emittervoltage Vge of the Miller period (a period of time t1 to t2 in FIG. 2A),which will be referred to as Vge(on), is present in a Vge range wherethe Qg decreases with an increase in the Vge on the staticcharacteristic of Vce=600V (Vge range showing negative capacity). Inthis case, the Qg waveform of the dynamic characteristic fiercelyshakes. On the other hand, in the IEGT according to the present example1, the Vge range showing the negative capacity shifts to the highvoltage side, where the Vge(on) is not present. In this case, the Qgwaveform of the dynamic characteristic barely shakes.

The phenomenon of the Qg decreasing with an increase in the Vge iscalled negative capacity (gate negative capacity), because Cg=dQg/dVgebecomes negative. The negative capacity is known as a cause of bringingabout a current unbalance in parallel driving of semiconductor devices(for example, Jpn. Pat. Appln. KOKAI Publication No. 2000-40951, andIEEE ELECTRON DEVICE LETTERS, VOL. 18, pp. 121-123). In addition,according to study by the present inventors, the following matters havebeen found in the relationship between the negative capacity andswitching noise of IEGTs.

Specifically, where the Vge(on) of the Miller period is present in a Vgerange showing the negative capacity, the Vge shakes as appearing in thedynamic characteristic of the IEGT according to the comparativeexample 1. Since the Vge shakes and rises for a short time, thecollector current is caused to abruptly flow, thereby generating a largedV/dt.

The negative capacity of the IEGT results from an increase in thepotential of the p-buffer layer caused by holes accumulating in thatregion of the p-buffer layer and n-base layer in the dummy cell DR,which is shallower than the trenches (i.e., an inter-trench region ofthe dummy cell). The increase in the potential of the p-buffer layer canbe controlled by the resistance value of a resistor electricallyconnecting the p-buffer layer to the emitter electrode.

Where a predetermined buffer resistor 14 is arranged to electricallyconnect the p-buffer layer 9 to the emitter electrode 12, a Vge range inwhich the negative capacity appears can be adjusted, as in the IEGTaccording to this embodiment. In other words, a predetermined bufferresistor 14 is used such that the Vge(on) is not present in a Vge rangeshowing the negative capacity, so as to prevent the Vge from shaking andto prevent a high dV/dt from occurring thereby.

FIGS. 4A and 4B are graphs obtained by simulations and showing therelationship of the dV/dt and on-state voltage relative to theresistance value Rbuff of a buffer resistor 14, and the relationship ofthe Vge range NCR, in which the Vge-Qg characteristic shows negativecapacity, and on-state voltage relative to the Rbuff, respectively. InFIGS. 4A and 4B, Vce(sat) stands for the collector-emitter voltage inthe on-state (saturation voltage), Vge(on) for the gate-emitter voltagewhen not shaking in the Miller period, and Vth for the gate thresholdvoltage. The conditions on the IEGTs in the simulations were the same asthose explained with reference to FIGS. 2A and 2B, except for parametersof the simulations.

The IEGT according to this embodiment is conceived to attain acharacteristic for reducing the switching noise while maintaining a lowon-state voltage characteristic. Accordingly, in FIG. 4A, a range wherethe Vce(sat) is low and the dV/dt is small corresponds to a preferablerange of the resistance value Rbuff of the buffer resistor 14. Under theconditions of the simulations, the preferable range of the Rbuff isabout 0.3 to 3Ω.

As shown in FIG. 4B, with an increase in the resistance value Rbuff ofthe buffer resistor 14, the value of the Vge ranges NCR1 to NCR6 showingthe negative capacity becomes lower. In the NCR1 and NCR2 where theRbuff is 3Ω or less, these ranges appear above the Vge(on). In thesecases, since the device reaches the on-state before suffering theinfluence of the negative capacity, switching noises are prevented fromoccurring.

On the other hand, in the NCR3 to NCR6 where the Rbuff is 5Ω or more,these ranges appear across or below the Vge (on). This means that theVge (on) of the Miller period is present in a Vge range showing thenegative capacity. In this case, as in conventional IEGTs accompanied byswitching noises, since the Vge shakes and rises for a short time, thecollector current is caused to abruptly flow, thereby generating a largedV/dt.

As described above, the IEGT according to this embodiment can reduceswitching noises while maintaining a low on-state voltagecharacteristic. In the turn-on of the IEGT, the voltage change rate(dV/dt) between the collector and emitter is gentle, and the dV/dt isadjustable by the gate resistance, The IEGT according to this embodimentmay allow the on-state voltage to be further reduced, by reducing thewidth Wa of each main cell MR, expanding the width Wb of each dummy cellDR, or expanding the width Wc of each trench 4.

Second Embodiment

FIG. 5 is a view showing the plan layout of a power semiconductor device(IEGT) according to a second embodiment of the present invention. FIG. 6is a sectional view taken along line VI-VI in FIG. 5. This embodimentadopts a buffer resistor 14 mainly employing a lateral resistance of ap-buffer layer 9. In other words, the buffer resistor 14 is planarlystructured.

Specifically, the surface of the p-buffer layer 9 in each of dummy cellsDR is covered with an insulating film 10. However, a buffer electrode 13electrically connected to an emitter electrode 12 is disposed on thatportion of the p-buffer layer 9, which corresponds to a position beyondthe end of n-emitter layers 8 in the channel width direction.Accordingly, the buffer resistor 14 includes a lateral resistance of thep-buffer layer 9 as a main component, on the route from that portion ofthe p-buffer layer 9, which faces the n-emitter layers 8, to the bufferelectrode 13.

The buffer electrode 13 may be disposed in each of portions, such asjunction termination regions, cell peripheral regions, or portions neargate lead electrodes 15 disposed at predetermined intervals in the chip.The resistance value of the buffer resistor 14 can be easily preset byadjusting the impurity concentration in the p-buffer layer 9 (e.g., tobe a predetermined value or less).

Third Embodiment

FIG. 7 is a view showing the plan layout of a power semiconductor device(IEGT) according to a third embodiment of the present invention. Thesectional view taken along line VI-VI in FIG. 7 is the same as thatshown in FIG. 6. This embodiment also adopts a buffer resistor 14 mainlyemploying a lateral resistance of a p-buffer layer 9.

Specifically, each of trenches 4 including a gate electrode 6 is cut atpredetermined intervals, while an emitter electrode 12 is continuouslyformed on each of main cells MR including the cut portion of the trench4. The p-buffer layer 9 is electrically connected to the emitterelectrode 12 through a p-connection layer 16 present at the cut portionof the trench 4. Accordingly, the buffer resistor 14 includes a lateralresistance of the p-buffer layer 9 as a main component, on the routefrom that portion of the p-buffer layer 9, which faces n-emitter layers8, to the emitter electrode 12 through the p-connection layer 16.

In this embodiment, the p-connection layer 16 is part of a layer commonto a p-base layer 7 and p-buffer layer 9. In this respect, thep-connection layer 16 is not limited to a specific formation manner, solong as it electrically connects the p-buffer layer 9 to the p-baselayer 7 at a position beyond the end of the gate electrode 6 in thechannel width direction.

Fourth Embodiment

FIG. 8 is a view showing the plan layout of a power semiconductor device(IEGT) according to a fourth embodiment of the present invention. FIG. 9is a sectional view taken along line IX-IX in FIG. 8. The sectional viewtaken along line VI-VI in FIG. 8 is the same as that shown in FIG. 6.This embodiment also adopts a buffer resistor 14 mainly employing alateral resistance of a p-buffer layer 9.

Specifically, each of trenches 4 including a gate electrode 6 and eachof emitter electrodes 12 are cut at predetermined intervals. Ap-connection layer 16H having a high impurity concentration is formed atthe cut portions of the trenches 4, and electrically connects thep-buffer layer 9 to a p-base layer 7. Accordingly, the buffer resistor14 includes a lateral resistance of the p-buffer layer 9 and p-baselayer 7 as a main component, on the route from that portion of thep-buffer layer 9, which faces n-emitter layers 8, to the emitterelectrode 12 through the p-connection layer 16H and p-base layer 7.

For example, the p-connection layer 16H may be disposed, through aninsulating film 17, below each of gate lead electrodes 15 disposed atpredetermined intervals in the chip.

Fifth Embodiment

FIG. 10 is a view showing the plan layout of a power semiconductordevice (IEGT) according to a fifth embodiment of the present invention.FIG. 11 is a sectional view taken along line XI-XI in FIG. 10. Thesectional view taken along line VI-VI in FIG. 10 is the same as thatshown in FIG. 6. This embodiment adopts a buffer resistor 14 mainlyemploying a lateral resistance of a p-buffer layer 9, and a p-connectionlayer 16L having a low impurity concentration.

Specifically, each of trenches 4 including a gate electrode 6 and eachof emitter electrodes 12 are cut at predetermined intervals. Ap-connection layer 16L having a low impurity concentration is formed atthe cut portions of the trenches 4, and electrically connects thep-buffer layer 9 to a p-base layer 7. Accordingly, the buffer resistor14 includes a lateral resistance of the p-connection layer 16L as a maincomponent, on the route from that portion of the p-buffer layer 9, whichfaces n-emitter layers 8, to the emitter electrode 12 through thep-connection layer 16L and p-base layer 7.

For example, the p-connection layer 16L may be disposed, through aninsulating film 17, below each of gate lead electrodes 15 disposed atpredetermined intervals in the chip. The resistance value of the bufferresistor 14 can be easily preset by adjusting the impurity concentrationin the p-connection layer 16L.

Sixth Embodiment

FIG. 12 is a view showing the plan layout of a power semiconductordevice (IEGT) according to a sixth embodiment of the present invention.FIG. 13 is a sectional view taken along line XIII-XIII in FIG. 12. Thesectional view taken along line VI-VI in FIG. 12 is the same as thatshown in FIG. 6. This embodiment adopts a buffer resistor 14 mainlyemploying a lateral resistance of a p-buffer layer 9 and p-extensionlayer 19.

Specifically, a p-layer 18 having a high impurity concentration isformed at position beyond the end of gate electrodes 6 in the channelwidth direction. An additional electrode 12 a electrically connected toemitter electrodes 12 is disposed on the p-layer 18. The p-buffer layer9 is electrically connected to the p-layer 18 through each ofp-extension layers 19 formed in a predetermined pattern. Accordingly,the buffer resistor 14 includes a lateral resistance of the p-bufferlayer 9 and p-extension layer 19 as a main component, on the route fromthat portion of the p-buffer layer 9, which faces n-emitter layers 8, tothe additional electrode 12 a through the p-extension layer 19 andp-layer 18.

For example, the p-layer 18 and an additional electrode 12 a may be ap-guard ring layer and ring electrode, respectively, disposed on each ofjunction termination regions. The resistance value of the bufferresistor 14 can be easily preset by adjusting the impurity concentrationin the p-extension layer 19.

Seventh Embodiment

FIG. 14 is a sectional view showing a power semiconductor device (IEGT)according to a seventh embodiment of the present invention. Thisembodiment adopts a buffer resistor 14 having an infinitely largeresistance value. In addition, each of dummy cells DR is provided withan inhibiting structure for reducing the quantity of holes to flow toand accumulate in an inter-trench region of the dummy cell, andparticularly in the p-buffer layer 9, as compared to a case where ap-base layer 7 and p-buffer layer 9 are formed with the same impurityconcentration and depth. The inhibiting structure is arranged to inhibitholes from flowing in the inter-trench region of the dummy cell from ap-collector layer 3, in the first period of time in the process ofturn-on of the IEGT, i.e., a period of time for the applied voltagebetween the gate and emitter to charge the capacity between the gate andemitter.

Specifically, the surface of the p-buffer layer 9 in each of the dummycells DR is covered with an insulating film 10. The p-buffer layer 9 isnot electrically connected to a p-base layer 7 or emitter electrode 12at any region of the IEGT, but is in a completely floating state.Furthermore, in order to form the inhibiting structure, the p-bufferlayer 9 has an additionally deep portion 9 a, so that the pn junctionbetween an n-base layer 1 and p-buffer layer 9 is positioned deeper thana trench 4 including a gate electrode 6. The impurity concentration inthe p-buffer layer 9 adjacent to the bottom of the trench 4 is set at1×10¹⁴ cm⁻³ or more, and, e.g., about 1×10¹⁵ cm⁻³. The difference indepth between the bottom of the trench 4 and the deepest portion of thepn junction between the n-base layer 1 and p-buffer layer 9 is set at0.5 μm or more, and preferably 1 μm or more.

FIGS. 15A and 15B are graphs obtained by experiments and showing voltageand current waveforms in the turn-on of an IEGT according to acomparative example 2, and an IEGT according to a present example 2 ofthe seventh embodiment, respectively. In FIGS. 15A and 15B, Vge standsfor the gate-emitter voltage, Vce for the collector-emitter voltage, andIc for the collector current.

In the experiments, both the IEGTs according to the comparative example2 and present example 2 were provided with a breakdown voltage of1,200V, an applied voltage of 600V between the collector and emitter, agate resistance Rg of 51Ω, an infinitely large resistance between thep-buffer layer 9 and emitter electrode 12, and an impurity concentrationof about 1×10¹⁵ cm⁻³ in the p-buffer layer 9 adjacent to the bottom ofthe trench 4. The difference in depth between the bottom of the trench 4and the deepest portion of the pn junction between the n-base layer 1and p-buffer layer 9 was 0 μm in the comparative example 2, and 1.5 μmin the present example 2.

As shown in FIG. 15A, in the IEGT according to the comparative example2, the dV/dt was as small as about 1 kV/μs in the Miller period t1 tot2, thereby causing the Miller period to be 2.5 μs or more, resulting ina slow turn-on. On the other hand, as shown in FIG. 15B, in the IEGTaccording to the present example 2, the dV/dt was moderately about 3.5kV/μs in the Miller period t1 to t2, thereby causing the Miller periodto be 1.5 μs, resulting in a fast turn-on.

FIG. 16 is a graph obtained by simulations and showing gate chargecharacteristics in the turn-on of the IEGT according to the comparativeexample 2, and the IEGT according to the present example 2. In FIG. 16,Vge stands for the gate-emitter voltage, Vce for the collector-emittervoltage, and Qg for the gate charge. Furthermore, solid lines showcharacteristics obtained by dynamic calculation, while broken lines showcharacteristics obtained by static calculation (Vce=0V and Vce=600V).The conditions on the IEGTs in the simulations were the same as thoseexplained with reference to FIGS. 15A and 15B, except for parameters ofthe simulations.

In the IEGT according to the comparative example 2, the line of Vce=600Vseparates from the line of Vce=0V at Vge=about −20V. On the other hand,in the IEGT according to the present example 2, the line of Vce 600V donot separate from the line of Vce=0V until Vge=about−7.5V. As aconsequence, the line of the IEGT according to the comparative example 2shifts toward the smaller value side of the gate charge (Qg), therebyprolonging the Miller period, as compared to the line of the IEGTaccording to the present example 2. This means that the IEGT accordingto the comparative example 2 holds a larger quantity of positive chargethat has to be discharged. The present inventors have researched andfound the following matters as regards the relationship between theMiller period length and the dummy cells DR of an IEGT.

In the IEGT according to the comparative example 2, a large quantity ofholes flow into the p-buffer layer 9 from the p-collector layer 3through the n-base layer 1, thereby gradually increasing the potentialof the p-buffer layer 9, in the first period of time in the process ofturn-on, i.e., a period of time for the applied voltage between the gateand emitter (mainly a negative voltage in this period of time) to chargethe capacity between the gate and emitter. An increase in the potentialof the p-buffer layer 9 affects a p-channel MOSFET structured of thep-buffer layer 9, n-base layer 1, p-base layer 7, and insulated gateelectrode 6. Specifically, due to an increase in the potential of thep-buffer layer 9, the p-channel of the p-channel MOSFET is pinched off,at the bottom of the trench 4 (the position indicated with point A inFIG. 14), at the early stage of the first period of time in the processof turn-on. As a consequence, holes are not exhausted from the p-bufferlayer 9, but holes of the 10¹⁸-order remain at the interface between thep-buffer layer 9 and trench 4.

On the other hand, in the IEGT according to the present example 2, sincethe p-buffer layer 9 is formed deeper than the trench 4, the quantity ofholes to flow to and accumulate in the p-buffer layer 9 from thep-collector layer 3 through the n-base layer 1 decreases, in the firstperiod of time in the process of turn-on. This is so, because anincrease in the potential of the p-buffer layer 9 and an increase in thepotential at the bottom of the trench (the position indicated with pointA in FIG. 14) caused thereby are suppressed. As a consequence, thep-channel MOSFET can operate until the late stage of the first period oftime in the process of turn-on, thereby further reducing the quantity ofholes to accumulate in the p-buffer layer 9.

As described above, the IEGT according to this embodiment can provide ahigh speed switching characteristic while maintaining a low on-statevoltage characteristic. In the turn-on of the IEGT, the voltage changerate (dV/dt) between the collector and emitter is optimized, and thedV/dt is adjustable by the gate resistance.

Eighth Embodiment

FIG. 17 is a sectional view showing a power semiconductor device (IEGT)according to an eighth embodiment of the present invention. Thisembodiment also adopts a p-buffer layer 9 preset in a completelyfloating state (there is a buffer resistor 14 having an infinitely largeresistance value). In addition, the width of dummy cells DR is smallerthan that of main cells MR, to form an inhibiting structure forinhibiting holes from flowing in the p-buffer layer 9 from an n-baselayer 1.

Specifically, the main cells MR and dummy cells DR are not alternatelydisposed, but a plurality of dummy cells DR with a small width aredisposed in series next to one main cell MR. Trenches 4 and 4 a forpartitioning the main cells MR and dummy cells DR have the same depth,while being disposed at different intervals. Where the interval (betweenthe centers) of a pair of trenches 4 sandwiching one main cell MR is W1,and the interval (between the centers) of a pair of trenches 4 and 4 asandwiching one dummy cell DR is W2, W2/W1 is set at ⅔ or less, andpreferably at ½ or less.

The trench 4 adjacent to the main cell MR is provided with a gateelectrode 6 buried therein, while it is wrapped in a gate insulatingfilm 5. On the other hand, the trench 4 a adjacent only to the dummycell DR is provided with a dummy electrode 20 buried therein, while itis wrapped in an insulating film 5 a. The dummy electrode 20 iselectrically connected to an emitter electrode 12. In this respect, thedummy electrode 20 may be electrically connected not to the emitterelectrode 12, but to the gate electrode 6.

Since the width of the dummy cells DR is smaller, the quantity of holesflowing in the p-buffer layer 9 from the n-base layer 1 decreases in thefirst period of time in the process of turn-on. As a consequence, thepotential of the p-buffer layer 9 is prevented from increasing in theprocess of turn-on of the IEGT, thereby providing a high speed switchingcharacteristic while maintaining a low on-state voltage characteristic.

Ninth Embodiment

FIG. 18 is a sectional view showing a power semiconductor device (IEGT)according to a ninth embodiment of the present invention. Thisembodiment also adopts a p-buffer layer 9 preset in a completelyfloating state (there is a buffer resistor 14 having an infinitely largeresistance value). In addition, the depth of trenches for dummy cells DRis larger than that of trenches for main cells MR, to form an inhibitingstructure for inhibiting holes from flowing in the p-buffer layer 9 froman n-base layer 1.

Specifically, the main cells MR and dummy cells DR are not alternatelydisposed, but a plurality of dummy cells DR with a deeper trench 4 b aredisposed in series next to one main cell MR. Trenches 4 and 4 b forpartitioning the main cells MR and dummy cells DR are disposed atconstant intervals, while having different depths. Where the depth oftrenches 4 adjacent to the main cells MR is D1, and the depth oftrenches 4 b adjacent only to the dummy cell DR is D2, (D2−D1) is set at1 μm or more, and preferably at 1.5 μm or more.

The trench 4 adjacent to the main cell MR is provided with a gateelectrode 6 buried therein, while it is wrapped in a gate insulatingfilm 5. On the other hand, the trench 4 b adjacent only to the dummycell DR is provided with a dummy electrode 20 buried therein, while itis wrapped in an insulating film 5 b. The dummy electrode 20 iselectrically connected to an emitter electrode 12. In this respect, thedummy electrode 20 may be electrically connected not to the emitterelectrode 12, but to the gate electrode 6.

Since the depth of the trenches 4 b for the dummy cells DR is larger,the quantity of holes flowing in the p-buffer layer 9 from the n-baselayer 1 decreases in the first period of time in the process of turn-on.As a consequence, the potential of the p-buffer layer 9 is preventedfrom increasing in the process of turn-on of the IEGT, thereby providinga high speed switching characteristic while maintaining a low on-statevoltage characteristic.

Tenth Embodiment

FIG. 19 is a sectional view showing a power semiconductor device (IEGT)according to a tenth embodiment of the present invention. Thisembodiment also adopts a p-buffer layer 9 preset in a completelyfloating state (there is a buffer resistor 14 having an infinitely largeresistance value). In addition, p-projecting layers are formed in ann-base layer 1 and respectively in contact with the bottoms of trenchesfor dummy cells DR, to form an inhibiting structure for inhibiting holesfrom flowing in the p-buffer layer 9 from an n-base layer 1.

Specifically, the main cells MR and dummy cells DR are not alternatelydisposed, but a plurality of dummy cells DR are disposed in series nextto one main cell MR Trenches 4 and 4 c for partitioning the main cellsMR and dummy cells DR are disposed at constant intervals, while havingthe same depth. However, the trench 4 c adjacent only to the dummy cellDR is provided with a p-projecting layer 21 formed in the n-base layer1, wherein the p-projecting layer 21 is in contact with the bottom ofthe trench 4 c and projects into the dummy cell DR. The p-projectinglayer 21 reaches a depth of 1 μm or more, and preferably of 1.5 μm ormore, from the bottom of the trench 4 c. The p-projecting layer 21 maybe formed by, e.g., a method of ion-implanting a p-type impurity intothe bottom of the trench 4 c, and thermally diffusing it, followingformation of the trench 4 c.

The trench 4 adjacent to the main cell MR is provided with a gateelectrode 6 buried therein, while it is wrapped in a gate insulatingfilm 5. On the other hand, the trench 4 c adjacent only to the dummycell DR is provided with a dummy electrode 20 buried therein, while itis wrapped in an insulating film 5 c. The dummy electrode 20 iselectrically connected to an emitter electrode 12. In this respect, thedummy electrode 20 may be electrically connected not to the emitterelectrode 12, but to the gate electrode 6.

Since the p-projecting layer 21 is disposed at the bottom of each of thetrenches 4 c for the dummy cells DR, the quantity of holes flowing inthe p-buffer layer 9 from the n-base layer 1 decreases in the firstperiod of time in the process of turn-on. As a consequence, thepotential of the p-buffer layer 9 is prevented from increasing in theprocess of turn-on of the IEGT, thereby providing a high speed switchingcharacteristic while maintaining a low on-state voltage characteristic.

Eleventh Embodiment

FIG. 20 is a view showing the plan layout of a power semiconductordevice (IEGT) according to an eleventh embodiment of the presentinvention. FIG. 21 is a sectional view taken along line XXI-XXI in FIG.20. The sectional view taken along line VI-VI in FIG. 20 is the same asthat shown in FIG. 6. This embodiment adopts a buffer resistor 14 havingan infinitely large resistance value. In addition, a switching elementfor selectively connecting a p-buffer layer 9 to a p-base layer 7 isformed at a position beyond the end of a gate electrode 6 in the channelwidth direction. The switching element is arranged to exhaust holes fromthe p-buffer layer 9 to the p-base layer 7, in the first period of timein the process of turn-on of the IEGT, i.e., a period of time for theapplied voltage between the gate and emitter to charge the capacitybetween the gate and emitter.

Specifically, the surface of the p-buffer layer 9 in each of the dummycells DR is covered with an insulating film 10. The p-buffer layer 9 isnot electrically connected to the p-base layer 7 or emitter electrode 12at any region of the IEGT, but is in a completely floating state.Furthermore, the trenches 4 each including the gate electrode 6, and theemitter electrodes 12 are cut at predetermined intervals, and aband-like n-intermediate layer 23 is disposed at the cut portions. Then-intermediate layer 23 is disposed, through an insulating film 17,below each of gate lead electrodes 15, which are disposed atpredetermined intervals in the chip.

A p-inversion layer is induced in that portion of the n-intermediatelayer 23, which faces an end portion of the gate electrode 6 and thegate lead electrode 15, when a negative voltage is applied to theseelectrodes. As a result, a p-channel MOSFET (the switching elementdescribed above) is formed between the p-base layer 7 and p-buffer layer9, using the n-intermediate layer 23 as a channel region, and the endportion of the gate electrode 6 and the gate lead electrode 15 as adriving electrode.

In this embodiment, the n-intermediate layer 23 is formed of part of then-base layer 1 having a low impurity concentration. In this respect, then-intermediate layer 23 may not be part of the n-base layer 1, but maybe any n-layer, so long as it is present between the p-base layer 7 andp-buffer layer 9 at a position facing an end portion of the gateelectrode 6 in the channel width direction. Since the p-channel MOSFETcan be operated, using an end portion of the gate electrode 6 as adriving electrode, the n-intermediate layer 23 does not have to bedisposed to correspond to the gate lead electrode 15.

In the IEGT according to this embodiment, holes are exhausted from thep-buffer layer 9 to the p-base layer 7 through the p-channel MOSFET, inthe first period of time in the process of turn-on, i.e., a period oftime for the applied voltage between the gate and emitter (mainly anegative voltage in this period of time) to charge the capacity betweenthe gate and emitter. Consequently, the quantity of holes to accumulatein the p-buffer layer 9 decreases, in the first period of time in theprocess of turn-on. As a result, as described with reference to FIG.15B, the dV/dt becomes moderate in the Miller period, thereby shorteningthe Miller period, and resulting in a fast turn-on.

As described above, the IEGT according to this embodiment can provide ahigh speed switching characteristic while maintaining a low on-statevoltage characteristic. In the turn-on of the IEGT, the voltage changerate (dV/dt) between the collector and emitter is optimized, and thedV/dt is adjustable by the gate resistance.

Twelfth Embodiment

FIG. 22 is a view showing the plan layout of a power semiconductordevice (IEGT) according to an twelfth embodiment of the presentinvention. FIG. 23 is a sectional view taken along line XXIII-XXIII inFIG. 22. The sectional view taken along line VI-VI in FIG. 22 is thesame as that shown in FIG. 6. This embodiment also adopts a bufferresistor 14 having an infinitely large resistance value. In addition, aswitching element for selectively connecting a p-buffer layer 9 to ap-base layer 7 is formed of a p-channel MOSFET having a gate electrodeof the planar type.

Specifically, trenches 4 each including a gate electrode 6, and emitterelectrodes 12 are cut at predetermined intervals, and an n-intermediatelayer 24 having a width of one trench 4 is disposed at the cut portionof each trench 4. A band-like gate electrode 27 is disposed on then-intermediate layers 24 through an insulating film 26. As a result, ap-channel MOSFET (the switching element described above) is formedbetween the p-base layer 7 and p-buffer layer 9, using then-intermediate layer 24 as a channel region, and the gate electrode 27as a driving electrode.

Also in the IEGT according to this embodiment, holes are exhausted fromthe p-buffer layer 9 to the p-base layer 7 through the p-channel MOSFET,in the first period of time in the process of turn-on. As a result, itcan provide a high speed switching characteristic while maintaining alow on-state voltage characteristic.

Thirteenth Embodiment

FIG. 24 is a sectional view showing a power semiconductor device (IEGT)according to a thirteenth embodiment of the present invention. Thisembodiment relates to a modification of the first to twelfthembodiments. The sectional view shown in FIG. 24 corresponds to thatshown in FIG. 6.

Specifically, n-layers 28 are formed in the surface of a p-buffer layer9 in each of dummy cells DR. The n-layers 28 are formed along withn-emitter layers 8, which are formed in the surface of a p-base layer 7in each of main cells MR, in the same step. In other words, the n-layers28 are substantially the same as the n-emitter layers 8. Thisarrangement allows a process of manufacturing the IEGT to be easier.Where a buffer resistor 14 is formed to use a lateral resistance of thep-buffer layer 9, the n-layers 28 may be utilized to adjust theresistance value of the buffer resistor 14.

Fourteenth Embodiment

FIG. 27 is a sectional view showing a power semiconductor deviceaccording to a fourteenth embodiment of the present invention. As shownin FIG. 27, on one side of an n-base layer 31 having a high resistivity,a p-collector layer 33 having a high impurity concentration is disposed.An n-buffer layer having a high impurity concentration may be disposedbetween the n-base layer 31 and p-collector layer 33. On the other sideof the n-base layer 31, a plurality of trenches 34 are formed atintervals in the n-base layer 31, such that main cells MR and dummycells DR are partitioned.

In each of the main cells MR, an n-barrier layer 32 having an impurityconcentration higher than that of the n-base layer 31 is formed in thesurface of the n-base layer 31. A p-base layer 37 is disposed on then-barrier layer 32. N-emitter layers 38 are formed in the surface of thep-base layer 37. In each of the dummy cells DR, a p-diverter layer 39 isdisposed on the n-base layer 31. The p-base layers 37 and p-diverterlayers 39 may be formed independently of each other, or may be formed bydividing a common p-layer by the trenches 34.

A collector electrode 41 is disposed on and in contact with thep-collector layer 33. An emitter electrode 42 is disposed on and incontact with the p-base layer 37 and n-emitter layers 38. A p-contactlayer having a high impurity concentration may be formed in the p-baselayer 37 and in contact with the emitter electrode 42.

Of the trenches 34, the trench 34 adjacent to each of the main cells MRis provided with a gate electrode 36 buried therein, while it is wrappedin a gate insulating film 35. Where the main cells MR and dummy cells DRare alternately disposed, the gate electrode 36 is buried in each of allthe trenches 34. The gate electrode 36 faces that portion of the p-baselayer 37, which is sandwiched between the n-base layer 31 and n-emitterlayer 38, through the gate insulating film 35.

As a consequence, an n-channel MOSFET is formed in the main cell MR,such that it selectively connects the n-emitter layer 38 to the n-baselayer 31, using the p-base layer 37 as a channel region, to injectelectrons. On the other hand, the dummy cells DR are not provided withsuch an n-channel MOSFET.

The power semiconductor device shown in FIG. 27 can attain a lowon-state voltage almost the same as that of a thyrister, where theimpurity concentration in the n-barrier layer 32, and/or the depth,width, interval of the trenches 34 are suitably designed. This is givenby a barrier effect of the n-barrier layer 32 and a narrow currentpassage formed by each of the main cells MR, which restrict holes beingexhausted into the emitter electrode 42. As a consequence, the injectionefficiency of electrons from the n-emitter layers 38 into the n-baselayer 31 improves.

A diverter electrode 43 is disposed on the p-diverter layer 39 in eachof the dummy cells DR. The diverter electrode 43 is electricallyconnected to the emitter electrode 42 through a rectifying element 44.The cathode side and anode side of the rectifying element 44 areelectrically connected to the emitter electrode 42 and diverterelectrode 43, respectively.

FIGS. 28A and 28B are views showing operations of the powersemiconductor device shown in FIG. 27. The rectifying element 44 ispreset to be conductive when the p-diverter layer 39 is supplied with apotential larger than the built-in voltage (about 0.7V). When therectifying element 44 is conductive in the process of turn-off of thedevice, holes are exhausted to the emitter electrode 42 through therectifying element 44.

As shown in FIG. 28A, in the on-state, the resistance against holesbeing exhausted to the p-base layer 37 is high due to the n-barrierlayer 32. At this time, since the potential of the p-diverter layer 39is low, the rectifying element 44 does not become conductive, therebyprevent holes from being exhausted. As a consequence, the dummy cellwith the p-diverter layer 39 provides the same effect as the dummy cellof an IEGT does. This effect cooperates with the barrier effect of then-barrier layer to greatly reduce the on-resistance of the device.

On the other hand, as shown in FIG. 28B, in the process of turn-off, thepotential of the p-diverter layer 39 increases and the rectifyingelement 44 becomes conductive. Then, holes are exhausted from the n-baselayer 31 through the p-diverter layer 39 into the emitter electrode 42.At this time, due to a high resistance of the n-barrier layer 32 againstholes, the quantity of holes flowing through the main cell including then-emitter layers 38 is smaller than that through the dummy cellincluding the p-diverter layer 39. As a consequence, in the turn-off,holes are mainly exhausted from the p-diverter layer 39, therebyshortening the turn-off time and reducing the turn-off loss.

As a secondary effect of the n-barrier layer 32, the hole currentflowing directly below the n-emitter layers 38 reduces, as compared toany of IEGT, CSTBT, and diverter structures. This increases the latch-upwithstand capacity of the power semiconductor device, and improves theshut-off withstand capacity and load-shortcircuit withstand capacitythereof.

Fifteenth Embodiment

FIG. 29 is a sectional view showing a power semiconductor deviceaccording to a fifteenth embodiment of the present invention. Thisembodiment adopts a diode 45 as an example of the rectifying element 44shown in FIG. 27.

Specifically, a semiconductor layer having a p-anode layer 46 andn-cathode layer 47 is disposed on an n-emitter layer 38, insulating film35 in a trench 34, and p-diverter layer 39. The p-anode layer 46 is incontact with a diverter electrode 43, while the n-cathode layer 47 is incontact with an emitter electrode 42. This device may be formed by thefollowing method.

First, poly-crystalline silicon doped with an n- (or p-) type impurityis deposited on the surface of a substrate by means of, e.g., CVD. At aportion to have an opposite conductivity type, a p- (or n-) typeimpurity is ion-implanted, and thermally diffused. Then, the diverterelectrode 43 and emitter electrode 42 are formed to be in contact withthe p-anode layer 46 and n-cathode layer 47, respectively.

Sixteenth Embodiment

FIG. 30 is a sectional view showing a power semiconductor deviceaccording to a sixteenth embodiment of the present invention. Thisembodiment adopts a diode 45, which is disposed on the surface of asubstrate through an insulating film, and functions as the rectifyingelement 44 shown in FIG. 27.

Specifically, an insulating film 48 is disposed on an n-emitter layer38, insulating film 35 in a trench 34, and p-diverter layer 39. Asemiconductor layer having a p-anode layer 46 and n-cathode layer 47 isdisposed on the insulating film 48. The p-anode layer 46 is in contactwith a diverter electrode 43, while the n-cathode layer 47 is in contactwith an emitter electrode 42. This device has an increased insulationproperty above the gate electrode 36, thereby improving the reliabilityof the device.

Seventeenth Embodiment

FIG. 31 is a sectional view showing a power semiconductor deviceaccording to a seventeenth embodiment of the present invention. Thisembodiment adopts a diode 45, which is disposed directly on the surfaceof a substrate, and functions as the rectifying element 44 shown in FIG.27.

Specifically, a semiconductor layer having a p-anode layer 46 andn-cathode layer 47 is disposed on an n-emitter layer 38, insulating film35 in a trench 34, and p-diverter layer 39. Since no diverter electrode43 is disposed, the p-anode layer 46 is in contact with the p-diverterlayer 39, while the n-cathode layer 47 is in contact with an emitterelectrode 42. This device can simplify the wiring structure on theemitter side.

Eighteenth Embodiment

FIG. 32 is a sectional view showing a power semiconductor deviceaccording to an eighteenth embodiment of the present invention. Thisembodiment adopts a p-channel MOSFET 50 for selectively connecting adiverter electrode 43 to an emitter electrode 42. The p-channel MOSFET50 is driven by a driving electrode electrically connected to a gateelectrode 36.

In the power semiconductor device shown in FIG. 32, when the appliedvoltage between the gate and emitter lowers from positive to negative (achange in potential of the gate electrode 36) and takes a predeterminednegative value, the p-channel MOSFET 50 becomes conductive. Then, holesare exhausted from the n-base layer 31 through the p-diverter layer 39into the emitter electrode 42.

Since the driving electrode of the p-channel MOSFET 50 is ganged withthe gate electrode 36 of the main structure, holes can be prevented frombeing exhausted when the potential of the p-diverter layer 39 increasesin the on-state, unlike the device shown in FIG. 27. Furthermore, theMOSFET has no built-in voltage, thereby reducing the resistance againstholes being exhausted in the turn-off.

Nineteenth Embodiment

FIG. 33 is a sectional view showing a power semiconductor deviceaccording to a nineteenth embodiment of the present invention. Thisembodiment adopts a MOSFET 51, which is formed in the bulk of asubstrate, and functions as the p-channel MOSFET 50 shown in FIG. 32.

Specifically, an n-intermediate layer 52 is formed in a p-diverter layer39 and in contact with a trench 34. In addition, a p-counter layer 53 isformed in the surface of the n-intermediate layer 52. The n-intermediatelayer 52 and p-counter layer 53 are in contact with an additionalelectrode 54, which is formed of an integrally extending portion of anemitter electrode 42. The p-channel MOSFET 51 uses the n-intermediatelayer 52 as a channel region, parts of the p-counter layer 53 andp-diverter layer 39 as a pair of source/drain regions, and that portionof a gate electrode 36, which faces the intermediate layer 52 through agate insulating film 35, as a driving electrode. This device cansimplify the wiring structure on the emitter side.

Twentieth Embodiment

FIG. 34 is a sectional view showing a power semiconductor deviceaccording to a twentieth embodiment of the present invention. Thisembodiment adopts a MOSFET 55, which is formed on the surface of asubstrate, and functions as the p-channel MOSFET 50 shown in FIG. 32.

Specifically, the p-channel MOSFET 55 has a driving electrode 56disposed on an n-emitter layer 38, trench 34, and p-diverter layer 39,through an insulating film 57. The driving electrode 56 is formedintegrally with a gate electrode 36 such that the gate electrode 36 anddriving electrode 56 form a T-shape in a sectional view. A semiconductorlayer is disposed on the driving electrode 56 through an insulating film58, and providing a pair of p-source/drain layers 61 and 62, and ann-base layer 63 for the channel region, of the p-channel MOSFET 55. Thepair of the p-source/drain layers 61 and 62 are in contact with adiverter electrode 43 and emitter electrode 42, respectively.

The device shown in FIG. 34 facilitates design of the threshold voltageof the p-channel MOSFET, as compared to the device shown in FIG. 32,which requires a triple diffusion process. On the other hand, thisdevice entails a complicated wiring structure, as compared to the deviceshown in FIG. 32.

Twenty-First Embodiment

FIGS. 35A to 35C are sectional views showing steps of a method ofmanufacturing a power semiconductor device according to a twenty-firstembodiment of the present invention. This manufacturing method can beapplied to any of the devices shown in FIGS. 27 to 34 (the fourteenth totwentieth embodiments).

First, a plurality of p-diverter layers 39 are formed in the surface ofa n-base layer 31 by means of diffusion, not to overlap with regionscorresponding to n-emitter layers 38 (FIG. 35A). In this embodiment, thep-diverter layers 39 are formed to have a depth larger than that oftrenches 34. In this respect, the p-diverter layers 39 may be formed asshallow layers as shown in FIG. 27.

Then, impurities are ion-implanted into portions corresponding ton-barrier layers 32, p-base layers 37, and n-emitter layers 38 betweenthe plurality of p-diverter layers 39. Then, a thermal treatment isperformed, so that the ion-implanted impurities are diffused andactivated, thereby forming the n-barrier layers 32, p-base layers 37,and n-emitter layers 38 (FIG. 35B). Then, a plurality of trenches 34 areformed to partition the p-diverter layers 39 from the p-base layers 37.Then, gate insulating films 35 and gate electrodes 36 are sequentiallyformed in the trenches 34 (FIG. 35C).

According to this method, the p-base layers 37 and p-diverter layers 39are separately formed, and then partitioned by the trench 34 at the end.In this case, the impurity concentration in the p-base layers 37 can beindependently controlled, thereby increasing the reliability of the MOSchannel region.

Twenty-Second Embodiment

FIGS. 36A to 36D are sectional views showing steps of a method ofmanufacturing a power semiconductor device according to a twenty-secondembodiment of the present invention. This manufacturing method can beapplied to any of the devices shown in FIGS. 27 to 34 (the fourteenth totwentieth embodiments).

First, a plurality of trenches 34 are formed at intervals in an n-baselayer 31. Then, gate insulating films 35 and gate electrodes 36 aresequentially formed in the trenches 34 (FIG. 36A). Then, n-barrierlayers 32 are formed in the surface of an n-base layer 31 by means ofdiffusion, at regions between the plurality of trenches 34, e.g., atevery other region (FIG. 36B).

Then, a p-impurity is diffused in the surface of the n-base layer 31 andn-barrier layers 32 at all the regions between the plurality of trenches34. By doing so, p-base layers 37 and p-diverter layers 39 are formed atthe same time (FIG. 36C). Then, n-emitter layers 38 are formed in thesurface of the p-base layers 37 (FIG. 36D).

According to this method, the p-base layers 37 and p-diverter layers 39are formed in self-alignment relative to the trenches 34. In this case,there is no fear of mask-misalignment for the p-diverter layers 39.

Twenty-Third Embodiment

FIG. 37 is a sectional view showing a power semiconductor deviceaccording to a twenty-third embodiment of the present invention. Thedevice according to this embodiment has a rectifying element 44 forelectrically connecting a p-diverter layer 39 to an emitter electrode42, as in the device shown in FIG. 27. In this embodiment, however, thearea of p-diverter layers 39 is formed wider.

Specifically, main cells MR and dummy cells DR are not alternatelydisposed, but a plurality of dummy cells DR are disposed in series nextto one main cell MR. In other words, dummy trenches 34 a are formed topartition a plurality of dummy cells DR in wider p-diverter layers 39disposed one on either side of one main cell MR. The dummy trenches 34 aand main trenches 34 are disposed at substantially constant intervals,while having substantially the same dimensions. Each of the dummytrenches 43 a is provided with a dummy electrode 65 buried therein,while it is wrapped in an insulating film 35 ab. The dummy electrode 65is electrically connected to the emitter electrode 42.

With an increase in the width of the p-diverter layer 39, such an effectis enhanced that improves injection efficiency of electrons with anarrow current passage formed in an IEGT structure. On the other hand,if the intervals of the trenches 34 are too large, electric fieldconcentration is caused at the bottom of each trench 34, therebylowering the breakdown voltage. The dummy trenches 34 a are formed as acountermeasure against this problem. In this case, if the dummyelectrode 65 is electrically connected to a gate electrode 36, the gatecapacity is increased, thereby reducing the switching speed. For thisreason, the dummy electrode 65 is electrically connected to the emitterelectrode 42. Accordingly, this device can reduce the on-resistancewhile preventing the switching speed from being reduced due to anincrease in the gate capacity.

Twenty-Fourth Embodiment

FIG. 38 is a sectional perspective view showing a power semiconductordevice according to a twenty-fourth embodiment of the present invention.FIG. 39 is a sectional view taken along line XXXIX-XXXIX in FIG. 38.This embodiment adopts a p-channel MOSFET 70 for selectively connectinga p-diverter layer 39 to an emitter electrode 42, as in the device shownin FIG. 32. In this embodiment, however, a p-base layer 37 andp-diverter layer 39 are lined up along a trench 34 on the same side ofthe trench 34 in the channel width direction.

Specifically, an n-barrier layer 32 having an impurity concentrationhigher than that of an n-base layer 31 is formed in the surface of then-base layer 31. The p-base layer 37 is formed in the surface of then-barrier layer 32. An n-emitter layer 38 is formed in the surface ofthe p-base layer 37. The p-diverter layer 39 is formed in the surface ofthe n-base layer 31 at a position separate from the n-barrier layer 32.The trench 34 is formed to divide each of the emitter layer 38, p-baselayer 37, n-barrier layer 32, and p-base layer 37 into two portions.

A gate electrode 72 is disposed, through the gate insulating film 71, onthose surface portions of the n-base layer 31 and n-barrier layer 32,which are sandwiched between the p-base layer 37 and p-diverter layer39. As a consequence, the p-channel MOSFET 70 is formed, such that itselectively connects the p-diverter layer 39 to the p-base Layer 37,using the n-base layer 31 and n-barrier layer 32 as a channel region, toexhaust holes. The gate electrode 72 used as the driving electrode ofthe p-channel MOSFET 70 is electrically connected to a gate electrode 36disposed in the trench 34. As a consequence, in the turn-off, holes areexhausted by the p-channel MOSFET 70 from the p-diverter layer 39through the p-base layer 37 into the emitter electrode 42.

This device structure can be manufactured by a method simpler than themethods according to the twenty-first and twenty-second embodiments.FIGS. 40A to 40D are sectional views showing steps of a method ofmanufacturing the power semiconductor device according to thetwenty-fourth embodiment of the present invention.

First, the n-barrier layer 32, p-base layer 37, n-emitter layer 38, andp-diverter layer 39 are formed in the surface of the n-base layer 31 bymeans of diffusion (FIG. 40A). Then, the trench 34 is formed from thesurface of the substrate into the n-base layer 31 to divide the layers32, 37, 38, and 39 into two portions. Then, an insulating film 76 andconductive film 77 are sequentially formed over the inside of the trench34 and the surfaces of the layers 32, 37, 38, and 39 (FIG. 40B).

Then, the insulating film 76 and conductive film 77 are partly removedto leave their portions in the trench 34 and on the surfaces of then-base layer 31 and n-barrier layer 32. As a consequence, the gateinsulating film 35 and gate electrode 36 in the trench 34, and the gateinsulating film 71 and gate electrode 72 of the p-channel MOSFET 70 areformed (FIG. 40C). Then, an insulating oxide film is formed to cover thegate electrode 72, and the emitter electrode 42 is formed thereafter(FIG. 40D).

According to this method, a device having a function equivalent to thatof the device shown in FIG. 32 can be realized by a manufacturing methodwith a lower difficulty. In addition, the impurity concentration in thep-base layers 37 can be controlled independently of the p-diverter layer39, thereby increasing the reliability of the MOS channel region.

Twenty-Fifth Embodiment

FIGS. 41A and 41B are sectional perspective views showing powersemiconductor devices according to a twenty-fifth embodiment of thepresent invention, and a modification thereof, respectively. Thisembodiment relates to the structure of an n-emitter layer 38. Thestructure of an n-emitter layer 38 shown in FIGS. 41A and 41B can beapplied to any of the devices shown in FIGS. 27 to 37 (the fourteenth totwenty-third embodiments).

In FIG. 41A, an n-emitter layer 38 is formed of a band-like layerextending along a trench 34 in the surface of a p-base layer 37. In thiscase, the n-emitter layer 38 and p-base layer 37 are in contact with anemitter electrode 42 by their surface portions extending in parallelwith the trench 34.

In FIG. 41B, an n-emitter layer 38 is formed of a plurality of layerportions separated along a trench 34 in the surface of a p-base layer37. In this case, the n-emitter layer 38 and p-base layer 37 arealternately in contact with an emitter electrode 42 along the trench 34.

According to the structure shown in FIG. 41B, where the structure isminiaturized to improve the performance of the device, contact of then-emitter layer 38 with the emitter electrode 42 can be obtained evenwithout mask alignment. In addition, this structure allows the intervalsof trenches 34 to be smaller, thereby further increasing the resistanceagainst holes being exhausted to reduce the on-resistance.

Twenty-Sixth Embodiment

FIG. 42 is a sectional view showing a power semiconductor deviceaccording to a twenty-sixth embodiment of the present invention. Thisembodiment relates to an example of power semiconductor devices of thelateral type, which has a function equivalent to that of the deviceshown in FIG. 27

As shown in FIG. 42, this device is formed on an SOI (Silicon OnInsulator) substrate, which has a semiconductor support layer 81,insulating layer 82, and semiconductor active layer 83. The active layer83 is used as an n-base layer 31 having a high resistivity. Ap-collector layer 33 and collector electrode 41 are disposed on theright side in FIG. 42. Trenches 34 are formed in the n-base layer 31 ata position remote from the p-collector layer 33, on the left side inFIG. 42. The structure around the trenches 34 is the same as that of theupper portion of the device shown in FIG. 27.

Since the device shown in FIG. 27 has a structure of the vertical type,in which the collector electrode and emitter electrode are disposed tosandwich the substrate, the main current flows vertically in the n-baselayer 31. On the other hand, since the device shown in FIG. 42 has astructure of the lateral type, in which the collector electrode andemitter electrode are disposed on the same side of the substrate, themain current flows horizontally in the n-base layer 31. Except for thisdifference, these two devices operate the same in principle.Accordingly, although the first to twenty-fifth embodiments areexemplified by power semiconductor devices of the vertical type, thefeatures of these embodiments may be applied, as they are, to powersemiconductor devices of the lateral type, as shown in FIG. 42.

According to the first to twenty-sixth embodiments of the presentinvention, it is possible to provide a power semiconductor device, whichhas a better switching characteristic while maintaining a low on-statevoltage.

Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore, the invention in its broader aspects isnot limited to the specific details and representative embodiments shownand described herein. Accordingly, various modifications may be madewithout departing from the spirit or scope of the general inventiveconcept as defined by the appended claims and their equivalents.

1. A power semiconductor device comprising: a first base layer of afirst conductivity type; a collector layer of a second conductivity typedisposed on the first base layer; a trench disposed in the first baselayer at a position remote from the collector layer; a second base layerof the second conductivity type disposed on the first base layer and incontact with the trench; an emitter layer of the first conductivity typedisposed on the second base layer; a gate electrode disposed in thetrench to face, through a gate insulating film, a portion of the secondbase layer sandwiched between the first base layer and the emitterlayer; a collector electrode disposed on the collector layer; an emitterelectrode disposed on the second base layer and the emitter layer; abarrier layer of the first conductivity type disposed between the firstbase layer and the second base layer, and having an impurityconcentration higher than that of the first base layer, the barrierlayer providing, in an on-state of the device, an increase in resistanceagainst flow of carriers of the second conductivity type from the firstbase layer into the emitter electrode through the second base layer,thereby improving injection efficiency of carriers of the firstconductivity type from the emitter layer into the first base layer; adiverter layer of the second conductivity type disposed on the firstbase layer, to exhaust carriers of the second conductivity type from thefirst base layer; and a rectifying element including a portion of thefirst conductivity type electrically connected to the emitter electrode,and a portion of the second conductivity type electrically connected tothe diverter layer, the rectifying element becoming conductive by achange in potential of the diverter layer, thereby exhausting carriersof the second conductivity type from the diverter layer into the emitterelectrode, in process of turn-off of the device.
 2. The device accordingto claim 1 wherein the rectifying element comprises a diode.
 3. Thedevice according to claim 1, further comprising a diverter electrodedisposed on the diverter layer, wherein the portion of the secondconductivity type of the rectifying element is electrically connected tothe diverter electrode.
 4. The device according to claim 3, wherein therectifying element is formed in a semiconductor layer disposed on thediverter layer, the trench, the emitter layer, or the second base layer,through an insulating film.
 5. The device according to claim 1, whereina plurality of trenches are disposed in the first base layer atintervals to partition a main cell and a dummy cell, and the gateelectrode is disposed in a trench of the plurality of trenches, adjacentto the main cell, and wherein the barrier layer, the second base layer,and the emitter layer are disposed in the main cell, and the diverterlayer is disposed in the dummy cell.
 6. The device according to claim 1,wherein the second base layer and the diverter layer are lined up alongthe trench on the same side of the trench in a channel width direction.7. The device according to claim 1, wherein the second base layer andthe emitter layer are alternately in contact with the emitter electrodealong the trench in a channel width direction.
 8. The device accordingto claim 1, wherein the diverter layer extends in the first base layerto a position deeper than the trench.
 9. A power semiconductor devicecomprising: a first base layer of a first conductivity type; a collectorlayer of a second conductivity type disposed on the first base layer; atrench disposed in the first base layer at a position remote from thecollector layer; a second base layer of the second conductivity typedisposed on the first base layer an in contact with the trench; anemitter layer of the first conductivity type disposed on the second baselayer; a gate electrode disposed in the trench to face, through a gateinsulating film, a portion of the second base layer sandwiched betweenthe first base layer and the emitter layer; a collector electrodedisposed on the collector layer; an emitter electrode disposed on thesecond base layer and the emitter layer; a barrier layer of the firstconductivity type disposed between the first base layer and the secondbase layer, and having an impurity concentration higher than that of thefirst base layer, the barrier layer providing, in an on-state of thedevice, an increase in resistance against flow of carriers of the secondconductivity type from the first base layer into the emitter electrodethrough the second base layer, thereby improving injection efficiency ofcarriers of the first conductivity type from the emitter layer into thefirst base layer; a diverter layer of the second conductivity typedisposed on the first base layer, to exhaust carriers of the secondconductivity type from the first base layer; and an MOSFET with a secondconductivity type channel configured to be driven by a driving electrodeelectrically connected to the gate electrode to selectively connect thediverter layer to the emitter electrode, the MOSFET with a secondconductivity type channel becoming conductive by a change in potentialof the driving electrode, thereby exhausting carriers of the secondconductivity type from the diverter layer into the emitter electrode, inprocess of turn-off of the device.
 10. The device according to claim 9,wherein the MOSFET with a second conductivity type channel comprises anintermediate layer of the first conductivity type disposed on thediverter layer and in contact with the trench, and a counter layer ofthe second conductivity type disposed on the intermediate layer, and theMOSFET with a second conductivity type channel uses the intermediatelayer as a channel region, the counter layer and a part of the diverterlayer as a pair of source/drain regions, and a portion of the gateelectrode facing the intermediate layer through the gate insulating filmas the driving electrode.
 11. The device according to claim 10, furthercomprising an additional electrode disposed on the intermediate layerand the counter layer, and electrically connected to the emitterelectrode.
 12. The device according to claim 9, wherein the drivingelectrode is disposed on the diverter layer, the trench, the emitterlayer, or the second base layer, through an insulating film, and theMOSFET with a second conductivity type channel comprises a pair ofsource/drain regions and a channel region formed in a semiconductorlayer disposed on the driving electrode through an insulating film. 13.The device according to claim 9, wherein the driving electrode isdisposed to face, through an insulating film, a surface portion of thefirst base layer and the buffer layer sandwiched between the diverterlayer and the second base layer.
 14. The device according to claim 9,wherein a plurality of trenches are disposed in the first base layer atintervals to partition a maincell and a dummy cell, and the gateelectrode is disposed in a trench of the plurality of trenches, adjacentto the main cell, and wherein the barrier layer, the second base layer,and the emitter layer are disposed in the main cell, and the diverterlayer is disposed in the dummy cell.
 15. The device according to claim9, wherein the second base layer and the diverter layer are lined upalong the trench on the same side of the trench in a channel widthdirection.
 16. The device according to claim 9, wherein the second baselayer and the emitter layer are alternately in contact with the emitterelectrode along the trench in a channel width direction.
 17. The deviceaccording to claim 9, wherein the diverter layer extends in the firstbase layer to a position deeper than the trench.